Spatial modulation of scalable nanostructures by combining maskless plasmonic lithography and grayscale-patterned strategy
نویسندگان
چکیده
Nanolithography techniques providing a good scalability and feature size controllability are of great importance for the fabrication integrated circuits (IC), MEMS/NEMS, optical devices, nanophotonics, etc. Herein, cost-effective, easy...
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ژورنال
عنوان ژورنال: Nanoscale advances
سال: 2023
ISSN: ['2516-0230']
DOI: https://doi.org/10.1039/d3na00147d